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iso sf6 is a which type of gas Japan

iso sf6 is a which type of gas Japan

26/8/2015Plasma etching/Gases. The type and ratio of gases used in a plasma etch is chosen depending on the material being etched, the masking material, and the etch stop material. Ideally, the gas mixture will react readily with the material being etched, while reacting minimally with materials that should not be etched, thus achieving high selectivity.

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